Structural analysis using Xe-plasma FIB.
Precision processing/structural evaluation is possible over a wide area of several hundred micrometers.
It achieves high positional accuracy and wide-area cross-section production, making it usable as a new large-capacity analysis application. Even small structures within a large area can be targeted for processing, enabling wide-area structural analysis.
- Company：一般財団法人材料科学技術振興財団 MST
- Price：Other
